Silicon Nitride-Based Integrated Photonic Platform for Advanced Telecommunications and Biosensing Applications

PROJECT COST:

1 335 588 $

PRIMA CONTRIBUTION:

586 788 $

PROJECT DETAILS:

AEPONYX specializes in the design and fabrication of integrated optical chips by leveraging the synergistic combination of silicon nitride (SiN) photonics and micro-electro-mechanical systems (MEMS). To fully exploit the potential of this advanced technology, several scientific and engineering challenges must be addressed. These include the deposition of high-quality, crack-free SiN thin films with thicknesses up to 1μm, the fabrication of ultra-low-loss optical waveguides (targeting losses below 2 dB/m), and the development of metrology tools capable of characterizing both the material layers and the performance of the resulting photonic devices with high precision.

To meet these challenges, a multidisciplinary research consortium has been formed, bringing together expertise from AEPONYX, the Institut National de la Recherche Scientifique (INRS), École de Technologie Supérieure (ÉTS), and the Université de Montréal. The project’s objectives include the development of a state-of-the-art silicon nitride photonic platform, as well as the exploration of its application potential in areas such as integrated biosensing and the generation of terahertz (THz) radiation.

This initiative will not only strengthen AEPONYX’s position as a global leader in SiN-based integrated photonic technologies but will also provide a unique collaborative framework for advancing research and innovation in Quebec. The project includes a strong training and knowledge transfer component, involving the supervision of three doctoral candidates and two postdoctoral researchers, and promoting shared access to advanced infrastructure and scientific expertise across institutional and industrial boundaries.