Advanced nanomanufacturing processes for prototyping integrated photonic devices made of silicon nitride.

PROJECT COST:

1 200 000 $

PRIMA CONTRIBUTION:

240 000 $

PROJECT DETAILS:

AEPONYX is a company that develops and manufactures optical chips for cloud computing. By combining silicon photonics with microelectromechanical systems (MEMS), AEPONYX is building the most affordable, compact, and energy-efficient optical microswitches. Over the past three years, AEPONYX has been able to develop its technology through close collaboration with numerous universities in Quebec. This development has laid the groundwork for a cutting-edge technology platform that now enables the company to demonstrate basic prototypes to customers, who are providing strong confirmation of the technology’s enormous commercial potential in promising markets such as 5G mobile telecommunications and next-generation high-capacity passive optical networks.
However, gaining access to this tremendous market requires solving fundamental technological challenges associated with the use of advanced materials. In this context, the project involving INRS and UQAM, in close collaboration with AEPONYX, aims to develop advanced nanomanufacturing processes for prototyping integrated photonic devices made of silicon nitride, specifically nanoscale lithography and pattern transfer via plasma etching. These processes, which are compatible with microelectronics industry standards, will be used to improve the optical performance of AEPONYX’s optical microswitch platform and will enable a transition to commercial foundries by 2021.